Portable Valve-less Peristaltic Micro-pump Design and Fabrication

摘要

This paper is to describe a design and fabrication method for a valve-lessperistaltic micro-pump. The valve-less peristaltic micro-pump with threemembrane chambers in a serial is actuated by three piezoelectric (PZT)actuators. With the fluidic flow design, liquid in the flow channel is pumpedto a constant flow speed ranged from 0.4 to 0.48 mm/s. In term of the maximumflow rate of the micro-pump is about 365 mircoliters/min, when the appliedvoltage is 24V and frequency 50 Hz. Photolithography process was used tofabricate the micro-pump mold. PDMS molding and PDMS bonding method were usedto fabricate the micro-channel and actuator chambers. A portable drivecontroller was designed to control three PZT actuators in a proper sequence todrive the chamber membrane. Then, all parts were integrated into the portablevalve-less peristaltic micro-pump system.